[A-8-2] Ta-based metal gates (Ta, TaBx, TaNx and TaCx) -Modulated Work Function and Improved Thermal Stability-

Reika Ichihara、Yoshinori Tsuchiya、Yuuichi Kamimuta、Masato Koyama、Akira Nishiyama (1.Advanced LSI Technology Laboratory, Toshiba Corp.)

https://doi.org/10.7567/SSDM.2005.A-8-2