Improvement of Mobility on Ultra-thin Body SOI MOSFETs by Use of High Pressure Hydrogen Annealing

Yunik Son; Md.Shahriar Rahman; Kiju Im; Man Chang; Hokyong Park; Hyunsang Hwang

doi:https://doi.org/10.7567/SSDM.2005.B-2-5

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜 2005年9月15日
International Conference Center Kobe, Kobe, Japan

[B-2-5] Improvement of Mobility on Ultra-thin Body SOI MOSFETs by Use of High Pressure Hydrogen Annealing

Yunik Son、Md.Shahriar Rahman、Kiju Im、Man Chang、Hokyong Park、Hyunsang Hwang (1.Department of Materials Science and Engineering, Gwangju Institute of Science and Technology)

https://doi.org/10.7567/SSDM.2005.B-2-5

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