The Japan Society of Applied Physics

[B-2-5] Improvement of Mobility on Ultra-thin Body SOI MOSFETs by Use of High Pressure Hydrogen Annealing

Yunik Son、Md.Shahriar Rahman、Kiju Im、Man Chang、Hokyong Park、Hyunsang Hwang (1.Department of Materials Science and Engineering, Gwangju Institute of Science and Technology)

https://doi.org/10.7567/SSDM.2005.B-2-5