The Japan Society of Applied Physics

[B-2-6L] Fully-depleted ultra narrow (-10 nm) body Gate-All-Around CMOS transistors

Navab Singh, A. Agarwal, L. K. Bera, W.W. Fang, R. Kumar, G. Q. Lo, N. Balasubramanian, D. L. Kwong (1.Institute of Microelectronics, 2.National University of Singapore.)

https://doi.org/10.7567/SSDM.2005.B-2-6L