The Japan Society of Applied Physics

[B-9-2] Reliability and Memory Characteristics of Sequential Laterally Solidified LTPS TFT with a ONO Stack Gate Dielectric

Ssu-I Hsieh, Ya-Chin King, Hung-Tse Chen, Yu-Cheng Chen, Chi-Lin Chen, Jia-Xing Lin (1.Microelectronics Lab., STAR Group, Department of Electrical Engineering National Tsing-Hua University, 2.,Electronics Research and Service Organization Industrial Technology Research Institute)