The Japan Society of Applied Physics

[B-9-3] Direct measurement of the offset spacer effect on the carrier profiles in sub-50 nm p-MOSFETs

Hidenobu Fukutome, Takashi Saiki, Ryou Nakamura, Akihiro Usujima, Takayuki Aoyama (1.FUJITSU LABORATORIES LTD., 2.FUJITSU LIMITED, Advanced LSI development div.)

https://doi.org/10.7567/SSDM.2005.B-9-3