[C-2-1] Innovative Al Damascene Process for Nanoscale Interconnects

Kyung In Choi, Sung Ho Han, Sera Yun, Dae-Yong Kim, Jong Won Hong, Sang Woo Lee, Byung Hee Kim, Sung-Tae Kim, U In Chung, Joo Tae Moon (1.Process Development Team, Semiconductor R&D Center, Samsung Electronics Co. Ltd.)

https://doi.org/10.7567/SSDM.2005.C-2-1