[C-9-2] Integration of ultra shallow junctions in PVD TaN nMOS transistors with Flash Lamp Annealing

S. Severi, K. De Meyer, B. J. Pawlak, R. Duffy, C. Kerner, S. McCoy, J. Gelpey, T. Selinger, L-A Ragnarsson, P. P. Absil, M. Jurczak, S. Biesemans (1.IMEC, 2.Katholieke Universiteit. Leuven, ESAT-INSYS, 3.Philips Research Leuven, 4.Mattson Technology Canada)

https://doi.org/10.7567/SSDM.2005.C-9-2