[D-2-2] Integrated RF-MEMS Technology with Wafer-Level Encapsulation

Kei Kuwabara, Masami Urano, Junichi Kodate, Norio Sato, Tomomi Sakata, Hiromu Ishii, Toshikazu Kamei, Kazuhisa Kudou, Masaki Yano, Katsuyuki Machida (1.NTT Microsystem Integration Laboratories, NTT Corporation, 2.NTT Advanced Technology Corporation)

https://doi.org/10.7567/SSDM.2005.D-2-2