[D-7-2] A 6-bit A/D Converter for MEMS-control circuit

Jun Terada、Masami Urano、Jun-ichi Kodate、Shin’ichiro Mutoh、Katsuyuki Machida (1.NTT Microsystem Integration Laboratories, NTT Corporation)

https://doi.org/10.7567/SSDM.2005.D-7-2