[D-7-2] A 6-bit A/D Converter for MEMS-control circuit

Jun Terada, Masami Urano, Jun-ichi Kodate, Shin’ichiro Mutoh, Katsuyuki Machida (1.NTT Microsystem Integration Laboratories, NTT Corporation)

https://doi.org/10.7567/SSDM.2005.D-7-2