[E-4-4] Fabrication of spin-coat optical waveguides for optically interconnected LSI and influence if fabrication process on lower layer MOS capacitors

Tetsuo Tabei, Kazuhiko Maeda, Shin Yokoyama, Hideo Sunami (1.Research Center for Nanodevices and Systems, Hiroshima University, 2.Central Glass Co., LTD)

https://doi.org/10.7567/SSDM.2005.E-4-4