Acoustic Emission Characteristics of Nanocrystalline Porous Silicon Device Driven as an Ultrasonic Speaker

Kenji Tsubaki; Takuya Komoda; Nobuyoshi Koshida

doi:https://doi.org/10.7567/SSDM.2005.G-4-1

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜 2005年9月15日
International Conference Center Kobe, Kobe, Japan

[G-4-1] Acoustic Emission Characteristics of Nanocrystalline Porous Silicon Device Driven as an Ultrasonic Speaker

Kenji Tsubaki、Takuya Komoda、Nobuyoshi Koshida (1.Advanced Technologies Development Laboratory, Matsushita Electric Works, Ltd.、2.Graduate School of Eng., Tokyo Univ. of A&T)

https://doi.org/10.7567/SSDM.2005.G-4-1

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