The Japan Society of Applied Physics

[G-4-1] Acoustic Emission Characteristics of Nanocrystalline Porous Silicon Device Driven as an Ultrasonic Speaker

Kenji Tsubaki、Takuya Komoda、Nobuyoshi Koshida (1.Advanced Technologies Development Laboratory, Matsushita Electric Works, Ltd.、2.Graduate School of Eng., Tokyo Univ. of A&T)

https://doi.org/10.7567/SSDM.2005.G-4-1