[H-1-2] Optimization of Layout and Doping Profile Design for BT(Body Tied)-FinFET DRAM

Choong-Ho Lee、Chul Lee、Jae-man Yoon、Keunnam Kim、Seung Bae Park、Hee Soo Kang、Young Joon Ahn、Donggun Park (1.Device Research Team, R&D Center, Samsung Electronics)

https://doi.org/10.7567/SSDM.2005.H-1-2