Optimization of Layout and Doping Profile Design for BT(Body Tied)-FinFET DRAM

Choong-Ho Lee; Chul Lee; Jae-man Yoon; Keunnam Kim; Seung Bae Park; Hee Soo Kang; Young Joon Ahn; Donggun Park

doi:https://doi.org/10.7567/SSDM.2005.H-1-2

2005 International Conference on Solid State Devices and Materials

Sep 12, 2005 - Sep 15, 2005
International Conference Center Kobe, Kobe, Japan

[H-1-2] Optimization of Layout and Doping Profile Design for BT(Body Tied)-FinFET DRAM

Choong-Ho Lee, Chul Lee, Jae-man Yoon, Keunnam Kim, Seung Bae Park, Hee Soo Kang, Young Joon Ahn, Donggun Park (1.Device Research Team, R&D Center, Samsung Electronics)

https://doi.org/10.7567/SSDM.2005.H-1-2

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