The Japan Society of Applied Physics

[H-4-2] Impact of Vth interference suppression using a novel Poly Si shield on FLASH memories.

T. Fukumura, S. Shimizu, Y. Ikeda, M. Shimizu, M. Fujinaga, K. Ishikawa F. Ohta, A. Fukasawa, T. Yoshitake, K. Hirao, O. Tsuchiya, Y. Ohji (1.Renesas Technology Corp.)

https://doi.org/10.7567/SSDM.2005.H-4-2