The Japan Society of Applied Physics

[H-4-2] Impact of Vth interference suppression using a novel Poly Si shield on FLASH memories.

T. Fukumura、S. Shimizu、Y. Ikeda、M. Shimizu、M. Fujinaga、K. Ishikawa F. Ohta、A. Fukasawa、T. Yoshitake、K. Hirao、O. Tsuchiya、Y. Ohji (1.Renesas Technology Corp.)

https://doi.org/10.7567/SSDM.2005.H-4-2