[H-4-3] Highly Reliable 256Mb NOR Flash MLC with Self-Aligned Process and Controlled Edge Profile

Wook Hyun Kwon, Jung In Han, Bomsoo Kim, Chang-Ki Baek, Sang-Pil Sim, Wook H. Lee, Jee Hoon Han, Cheol Jung, Heon Kyu Lee, Young Kwan Jang, Jeung Hwan Park, Dae Mann Kim, Chan-Kwang Park, Kinam Kim (1.Advanced Technology Development Team, Semiconductor R&D Center, Samsung Electronics Co., LTD.)

https://doi.org/10.7567/SSDM.2005.H-4-3