[I-1-2] High-Voltage 4H-SiC RESURF MOSFETs Processed by Oxide Deposition and N2O Annealing

Tsunenobu Kimoto, Hiroaki Kawano, Masato Noborio, Jun Suda (1.Dept. of Electronic Sci. & Eng., Kyoto University)

https://doi.org/10.7567/SSDM.2005.I-1-2