[I-1-5] A New ICP-CVD SiO2 Passivation for High Voltage Switching AlGaN/GaN HFETs

Min-Woo Ha, Seung-Chul Lee, Jin-Cherl Her, Kwang-Seok Seo, Min-Koo Han (1.School of Electrical Engineering #50, Seoul National University)

https://doi.org/10.7567/SSDM.2005.I-1-5