[I-1-5] A New ICP-CVD SiO2 Passivation for High Voltage Switching AlGaN/GaN HFETs

Min-Woo Ha、Seung-Chul Lee、Jin-Cherl Her、Kwang-Seok Seo、Min-Koo Han (1.School of Electrical Engineering #50, Seoul National University)

https://doi.org/10.7567/SSDM.2005.I-1-5