[P1-18] Ion-Implanted p/n Junction Characteristics in p- and n-type Germanium

T. Nishimura, M. Toyama, K. Kita, K. Kyuno, A. Toriumi (1.Department of Materials Engineering, School of Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.2005.P1-18