[P1-26] Characterization of Crystalline Defects and Stress in Shallow Trench Isolation by Cathodoluminescence and Raman Spectroscopies

Ryuichi Sugie, Keiko Matsuda, Naoto Nagai, Tsuneo Ajioka, Masanobu Yoshikawa, Toshikazu Mizukoshi, Katsuhiko Shibusawa, Shoji Yo (1.Toray Research Center Inc., 2.Miyagi Oki Electric Co., Ltd., 3.Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.2005.P1-26