The Japan Society of Applied Physics

[P1-7] A Novel Explanation of Substrate Bias Dependent Dielectric Breakdown Behavior with Channel Quantization Effect in Ultrathin Oxide pMOSFETs

Sinclair Chiang、J.W. You、C.T. Lu、M.F. Lu、S. Huang-Lu、S.C. Chien (1.Central Research and Development Division, UMC)

https://doi.org/10.7567/SSDM.2005.P1-7