[P2-11] The annealing effects of GaN MIS capacitors with photo-CVD oxide layers

Yu-Zung Chiou, Yan-Kuin Su, Shoou-Jinn Chang, Chun-Kai Wang, Jing-Jou Tang (1.Department of Electronics Engineering, Southern Taiwan University of Technology, 2.Department of Electrical Engineering, National Cheng-Kung University)

https://doi.org/10.7567/SSDM.2005.P2-11