The Japan Society of Applied Physics

[P2-13] Nickel Germanide Formation on Condensed Ge Layer for Ge-on-Insulator Device Application

Hoon Choi, Mungi Park, Takafumi Fukushima, Mitsumasa Koyanagi (1.Department of Bioengineering and Robotics, Tohoku University, 2.Mobile Display R&D Team, LCD Business, Samsung Electronics Co. Ltd.)

https://doi.org/10.7567/SSDM.2005.P2-13