[P2-8] Deep Trench Etching for Chip-to-Chip Three-Dimensional Integration

Hirokazu Kikuchi、Yusuke Yamada、Hitoshi Kijima、Takafumi Fukushima、Mitsumasa Koyanagi (1.Dept. of Bioengineering and Robotics, Tohoku Univ.)

https://doi.org/10.7567/SSDM.2005.P2-8