[P3-1] 3D Device Simulation for Neutron-induced Latch-up in CMOS Devices

H. Yamaguchi、E. Ibe、Y. Yahagi、H. Kameyama (1.Production Engineering Research Laboratory, Hitachi Ltd.、2.Renesas Kodaira Semiconductor Co. Ltd)

https://doi.org/10.7567/SSDM.2005.P3-1