The Japan Society of Applied Physics

[P3-10] Impact of Oxide Thickness Fluctuation on MOSFETs Gate Tunnelling

B. Cheng, S. Roy, A. Martinez, S. Markov, A. Asenov (1.Device Modelling Group, Dept. of Electronics and Electrical Engineering University of Glasgow)

https://doi.org/10.7567/SSDM.2005.P3-10