[P3-16] Mobility Modulation Technology Impact on Device Performance and Reliability for <100> sub-90nm SOI CMOSFETs

Chieh-Ming Lai, Chien-Ting Lin, Wen-Kuan Yeh, Yean-Kuen Fang, W. T. Shiau (1.Institute of Microelectronics, National Cheng Kung University, 2.Department of Electrical Engineering, National University of Kaohsiung, 3.United Microelectronics Corporation, Central R&D Division)

https://doi.org/10.7567/SSDM.2005.P3-16