[P3-18] A High Performance Embedded 60nm Gate Length CMOSFET with Novel Strained Silicon Process

Chih Jen Huang, K.Y. Chang, Sam Chou, Joe Koe, J. H. Huang, Hong Liao, C. Y. Lim (1.United Microelectronics Corp., Central Research & Development, 2.United Microelectronics-Singapore Corp., Advanced Process Integration)

https://doi.org/10.7567/SSDM.2005.P3-18