[P3-2] Characterization of Embedded Poly-Heater PMOSFETs and its Application on In-Line Wafer Level NBTI Monitor

C. S. Wang, W. C. Chang, W. S. Ke, C. T. Chiang, C. F. Lee, K. C. Su, M. J. Chen (1.Quality and Reliability Assurance Div., United Microelectronics Corp., 2.Department of Electronics Engineering, National Chiao Tung University)

https://doi.org/10.7567/SSDM.2005.P3-2