Effect of Compensation Implant in SONOS Flash EEPROMs

P. Bharath Kumar; Ravinder Sharma; E. Murakami; S. Kamohara; S. Mahapatra

doi:https://doi.org/10.7567/SSDM.2005.P4-6

2005 International Conference on Solid State Devices and Materials

Sep 12, 2005 - Sep 15, 2005
International Conference Center Kobe, Kobe, Japan

[P4-6] Effect of Compensation Implant in SONOS Flash EEPROMs

P. Bharath Kumar, Ravinder Sharma, E. Murakami, S. Kamohara, S. Mahapatra (1.Department of Electrical Engineering, Indian Institute of Technology, 2.Renesas Technology Corporation)

https://doi.org/10.7567/SSDM.2005.P4-6

▲