The Japan Society of Applied Physics

[P4-6] Effect of Compensation Implant in SONOS Flash EEPROMs

P. Bharath Kumar、Ravinder Sharma、E. Murakami、S. Kamohara、S. Mahapatra (1.Department of Electrical Engineering, Indian Institute of Technology、2.Renesas Technology Corporation)

https://doi.org/10.7567/SSDM.2005.P4-6