[P4-9] Effects of Voltage Cycling on Polarization and Reliability of 3D SBT Ferroelectric Capacitors Integrated in 0.18μm CMOS Technology.

Dirk J. Wouters, Ludovic Goux, Judit Lisoni, David Maes, Hans Vander Meeren, Vasile Paraschiv, Luc Haspeslagh, Cesare Artoni, Giuseppina Corallo, Raffaele Zambrano (1.IMEC, Silicon Process and Device Technology Division, 2.STMicroelectronics, Memory Products Group)

https://doi.org/10.7567/SSDM.2005.P4-9