[P6-12] HEMT Yield Improvement with Ultrasonic-assisted recess for High speed Integrated Circuit

Seong-Jin Yeon, Hyungtae kim, Jongwon Lee, Kwangseok Seo (1.Seoul National Univ., School Of Electrical Engineering and Computer Science)

https://doi.org/10.7567/SSDM.2005.P6-12