[P6-12] HEMT Yield Improvement with Ultrasonic-assisted recess for High speed Integrated Circuit
Seong-Jin Yeon、Hyungtae kim、Jongwon Lee、Kwangseok Seo
(1.Seoul National Univ., School Of Electrical Engineering and Computer Science)
https://doi.org/10.7567/SSDM.2005.P6-12