Surface Potential Measurement of Carbon Nanotube FETs using Kelvin Probe Force Microscopy

T. Umesaka; H. Ohnaka; Y. Ohno; S. Kishimoto; K. Maezawa; T. Mizutani

doi:https://doi.org/10.7567/SSDM.2006.A-6-5

[A-6-5] Surface Potential Measurement of Carbon Nanotube FETs using Kelvin Probe Force Microscopy

T. Umesaka, H. Ohnaka, Y. Ohno, S. Kishimoto, K. Maezawa, T. Mizutani (1.Department of Quantum Engineering, Nagoya University, 2.PRESTO, Japan Science and Technology Agency, 3.Venture Business Laboratory, Nagoya University, 4.Institute of Advanced Research, Nagoya University)

https://doi.org/10.7567/SSDM.2006.A-6-5

2006 International Conference on Solid State Devices and Materials

[A-6-5] Surface Potential Measurement of Carbon Nanotube FETs using Kelvin Probe Force Microscopy