[B-9-2] Deep Trench Isolation for Pixel Crosstalk Suppression in Active Pixel Sensor with 1.7μm pixel pitch

Byung Jun Park, Chang-Rok Moon, Young Woo Lee, Dae Woong Kim, Kee Hyun Paik, Jong Rycol Yoo, Young Sub Yoo, Yeol Jon, Chang Hyo Koo, Suk Chul Bang, Yum Ki Lee, Young Joon Cho, Sung Ho Hwang, Doo Cheol Park, Hee Geun Jung, Jong Cheol Shin, Jongwan Jung, Kang Bok Lee, Hyun Pil Noh, Duck Hyung Lee, Kinam Kim (1.Semiconductor Research Center, Memory Division, Semiconductor Business, Samsung Eectronics Co., 2.Department of Nano Science and Technology, Sejong University)

https://doi.org/10.7567/SSDM.2006.B-9-2