[C-1-3] A Capacitive-Sensing Scheme for Control of Adaptive MEMS Device Stacked on CMOS LSI

T. Shimamura, H. Morimura, K. Kuwabara, N. Sato, J. Terada, M. Ugajin, S. Shigematsu, K. Machida, M. Nakanishi, H. Ishii (1.NTT Microsystem Integration Laboratories, 2.NTT Advanced Technology Corporation)

https://doi.org/10.7567/SSDM.2006.C-1-3