[D-6-3] 65nm Node Transistor Characteristic Evaluation Technology for Assembly Stress and Assembly Stress Relaxation Design

Koji Takemura、Masao Takahashi、Hikari Sano、Koji Koike、Yutaka Itoh、Hiroshige Hirano (1.Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.2006.D-6-3