[D-6-3] 65nm Node Transistor Characteristic Evaluation Technology for Assembly Stress and Assembly Stress Relaxation Design

Koji Takemura, Masao Takahashi, Hikari Sano, Koji Koike, Yutaka Itoh, Hiroshige Hirano (1.Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.2006.D-6-3