[E-2-5] The High Temperature Thermally Treated SiNX Passivation of AlGaN/GaN HEMT using Remote PECVD

Jin-Cherl Her, Dong-Hwan Kim, Sung-Won Kim, Kyoung-Chul Jang, Jae-Hak Lee, Jae-Eung Oh, Kwang-Seok Seo (1.Seoul Nat’l Univ., EECS/EE., 2.THELEDS Co., LTD., 3.Hanyang Univ. EECS/EE)

https://doi.org/10.7567/SSDM.2006.E-2-5