[E-2-5] The High Temperature Thermally Treated SiNX Passivation of AlGaN/GaN HEMT using Remote PECVD

Jin-Cherl Her、Dong-Hwan Kim、Sung-Won Kim、Kyoung-Chul Jang、Jae-Hak Lee、Jae-Eung Oh、Kwang-Seok Seo (1.Seoul Nat’l Univ., EECS/EE.、2.THELEDS Co., LTD.、3.Hanyang Univ. EECS/EE)

https://doi.org/10.7567/SSDM.2006.E-2-5