[E-9-3] Device Isolation by Plasma Treatment for Planar Integration of E/D-mode AlGaN/GaN HEMTs

Ruonan Wang, Yong Cai, Wilson C. W. Tang, Kei May Lau, Kevin J. Chen (1.Department of Electrical and Electronic Engineering, Hong Kong University of Science and Technology)

https://doi.org/10.7567/SSDM.2006.E-9-3