The Japan Society of Applied Physics

[F-2-1] Overview and Future Challenges eDRAM Technologies

H. sugimura, T. Wake, K. Inoue, M. Hamada, H. Shirai, S. Arai, M. Takeuchi, T. Sakoh, M. Sakao, T. Tanigawa (1.Advanced Device Development Division, NEC Electronics Corporation)

https://doi.org/10.7567/SSDM.2006.F-2-1