[F-2-5] Gate Workfunction Engineering of Bulk FinFETs for Sub-50 nm DRAM Cell Transistors

Ki-Heung Park, Kyoung Rok Han, Young Min Kim, Jong-Ho Lee (1.School of EECS, Kyungpook National University)

https://doi.org/10.7567/SSDM.2006.F-2-5