[G-1-1] Carbon Nanotube Via Technologies for Advanced Interconnect Integration

Mizuhisa Nihei、Akio Kawabata、Takashi Hyakushima、Shintaro Sato、Tatsuhiro Nozue、Daiyu Kondo、Hiroki Shioya、Taisuke Iwai、Mari Ohfuti、Yuji Awano (1.MIRAI-Selete (Semiconductor Leading Edge Technologies, Inc.)、2.Fujitsu Limited、3.Nanotechnology Research Center, Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.2006.G-1-1