[G-1-1] Carbon Nanotube Via Technologies for Advanced Interconnect Integration

Mizuhisa Nihei, Akio Kawabata, Takashi Hyakushima, Shintaro Sato, Tatsuhiro Nozue, Daiyu Kondo, Hiroki Shioya, Taisuke Iwai, Mari Ohfuti, Yuji Awano (1.MIRAI-Selete (Semiconductor Leading Edge Technologies, Inc.), 2.Fujitsu Limited, 3.Nanotechnology Research Center, Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.2006.G-1-1